一、规 格Specifications：
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订货编号 Order No. |
544-531 |
544-533 |
544-535 |
544-537 |
544-539 |
544 |
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机 型Model |
LSM-500S |
LSM-501S |
LSM-503S |
LSM-506S |
LSM-512S |
LSM-902 |
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显示器Display |
544 |
LSM-902/6900 |
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品 牌Brand |
Mitutoyo |
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扫描频率 Number of scans |
3200回/秒 scans/s |
800回/秒scans/s |
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扫描速度 Scanning speed |
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使用温度 Operation temperature |
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使用湿度 Operation humidity |
35 ~ 85%RH (with no condensation) |
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测量领域 Measuring region |
1x |
4x |
10x |
20x |
30x |
3x |
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位置误差 Positional error |
±0.4μm |
±0.5μm |
±1.5μm |
±4μm |
±8μm |
±0.5μm |
|
在 Linearity at |
±0.3μm |
±0.5μm |
±1μm |
±3μm |
±6μm |
±0.5μm |
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重现性 Repeatability |
±0.03μm |
±0.04μm |
±0.1μm |
±0.36μm |
±0.8μm |
±0.05μm |
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最小解析值 Resolution(selectable) |
0.01μm |
0.01μm |
0.1μm |
0.1μm |
0.1μm |
0.01μm |
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测量范围 Measuring range |
0.005 |
0.05 |
0.3 |
1 |
1 |
0.1 |
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光 源Light source |
Wave Length：650nm，可视光半导体Visible Diode Laser |
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